Post exposure bake (PEB) heater

Tue, 23 Jun 2026 12:51:33 +0800

Out on the lithography floor, PEB temperature drift doesn’t show up with a warning light. It shows up as linewidths that wander, dose margin that evaporates, and scrap that you only catch after the fact. We built this post-exposure bake heater to take that uncertainty out, because photoresist chemistry doesn’t forgive you for drifting outside its thermal window. What matters, technically We run short-wave infrared with a quartz-halogen design, so heat couples straight into the wafer stage. Less thermal inertia, faster settling. Across the bake surface, wafer-level uniformity holds at ±0.1°C, and setpoint stability stays tight enough that critical dimensions don’t wander lot to lot. The unit fits cleanroom Class 1–100, and the materials and seals are chosen to keep particle generation at zero while exhaust byproducts stay under control. In production, you need it to keep running—this heater is built for 24/7 duty with zero unplanned downtime, even when the schedule won’t tolerate interruption. Why it works where it matters In photoresist processing, the PEB step drives the chemical amplification that actually defines the pattern. This heater turns the recipe intent into repeatable temperature—whether you’re doing soft bake, PEB, or hard bake. You end up with tighter CD control, fewer rework lots, and yield that behaves predictably. Energy use drops thanks to efficient radiant transfer and precise temperature control, and maintenance intervals stretch out because the components are solid and the thermal design stays clean. Things to keep in mind Installation is straightforward, but integration still needs your attention on the exhaust path, gas purge, and the interlocks already on your track or coater/baker. Make sure your existing controller can keep up with the heater’s response time; if the PID loop is too slow, you won’t get the full benefit of the thermal speed. Run a short qualification lot to correlate temperature profiles with linewidth data, then lock the recipe down.

Post on Eco-Friendly Infrared Heating

Post exposure bake (PEB) heater