Wafer burn in test heating lamp

Sat, 27 Jun 2026 01:20:07 +0800

On the fab floor, thermal excursions during burn-in and photoresist bake don’t just nudge yield—they wipe it out. A 0.5°C non-uniformity across the wafer prints a gradient straight into the photoresist, and that gradient turns into a dimensional error after exposure and development. You need heat you can treat like a real process parameter, not a wild card. What matters under the hood We built our wafer burn-in test heating lamps around short-wave NIR quartz emitters, because they dump energy fast and direct, with tight spectral control. The payoff is wafer-level temperature uniformity within ±0.1°C, repeatable bake profiles from soft bake to hard bake, and a thermal response quick enough to run stable ramps without overshoot. The system is engineered for cleanroom compatibility across Class 1–100, using low-outgassing materials and a mechanical layout that generates zero particles right at the heating point. Output stays stable over 5,000+ hours with less than 5% intensity drift, so your thermal budget stays consistent lot after lot. Why it fits what you’re actually doing In burn-in and probe testing, the die has to see a real thermal stress profile—without package-induced artifacts muddying the picture. In lithography support, photoresist demands a bake that’s uniform from edge to edge, across the whole wafer. Our lamps deliver that precision while keeping energy draw low and maintenance intervals long. You end up with tighter critical dimension control, fewer rework lots, and uptime you can plan around—no more chasing temperature excursions at 2 a.m. What you need to watch These lamps are compact, but the thermal density is high. Installation requires proper thermal isolation from adjacent modules and verified exhaust routing, or you’ll cook nearby polymers and cabling. They drop into standard tool footprints cleanly, but the emitter-to-wafer alignment tolerances are strict—set it once, document it, and lock it down.

Test on Eco-Friendly Infrared Heating

Wafer burn in test heating lamp