http://eco-ir-heater.com/zh/tags/%E5%BE%AE%E6%9C%BA%E7%94%B5%E7%B3%BB%E7%BB%9F/ Recent content in 微机电系统 on Eco-Friendly Infrared Heating Hugo zh Sun, 19 Jul 2026 08:29:14 +0800 http://eco-ir-heater.com/zh/posts/mems-sensor-wafer-drying-heater/ Sun, 19 Jul 2026 08:29:14 +0800 http://eco-ir-heater.com/zh/posts/mems-sensor-wafer-drying-heater/ <p><img src="http://eco-ir-heater.com/images/eeeb9669114c0c0a0b2bef3f902d01a9.png" alt="MEMS传感器晶圆干燥加热器"></p> <p>正确干燥MEMS传感器晶圆的方法<br> 干燥MEMS传感器晶圆是一项技术要求很高的工作。如果热量分布不均，表面张力就会起作用，导致传感器膜层粘在一起，从而损坏这些敏感的传感器结构。</p>